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CAD and Production Process Flow

CAD

CAD|EQUA Co.,Ltd
We bring concepts to life

With even just a simple rough sketch, EQUA can create CAD data as well as the desired patterns. We support a variety of applications. Please contact us for details.

Production Process

DWL-BW|EQUA
We achieve high levels of quality based on the latest equipment and a safe and reliable production system

For photomasks, we implement a 24-hour production system and deliver the best possible lead time. We also continuously maintain a lineup of the latest equipment, meeting the quality requirements of customers in a wide variety of fields.

Manufacturing Process

  ■ CAD Process      
   
Transfer
data / drawing
    
        
   
Check
specification & pattern
    
        
   
Pattern correction
& layout
    
         
         
        
         
 
 
 ■ Production Process     
   
(1)  Conversion of
CAD data
    
        
   
(2) Writing
    
        
   
(3) Development /Etch
    
        
   
(4) Measurement
    
        
   
(5) Inspenction
    
        
   
(6) Cleaning
    
      
  
*1 Mounting
Pellicle
*3 Hard
Coating
   
      
  
*2 Particle
Check
*4 Visual
Inspection
   
      
   
(7) Final Inspection
    
        
   
(8) Packing
    
         
         
 
 ■ Data Format
DXF, DWG, GDSII, GERBER, BMP, TIF, and the like many other data format.
■ Pattern Formation
Straight lines, circles, arcs, sine waves, spirals, random patterns, and the like can be laid out.
■ Pattern Correction
Flexible pattern correction that fits the process is performed.
■ Uses
Precise photolithography for sensors, displays, encoders, semiconductor packages, and the like. 
 
 
(1) Conversion of CAD data to imaging data
 
(2) Patterning by laser imaging device
 
(3) Developing/etching/resist stripping/cleaning process
 
(4) Measurement of line width and long dimensions using a laser interferometer or the like
 
(5) Visual inspection of pattern using AOI or other automatic defect detection equipment
 
(6) Mask surface cleaning and drying process
 
(7) Final inspection prior to shipping
 
(8) Packing into custom case, and shipping
 
 
■ Options
 
*1. Mounting of customized pellicle suited to the exposure device
 
*2. Particle check after mounting pellicle
 
*3. Application of hard coating liquid to protect mask surface
 
*4. Visual inspection after application of hard coating liquid
 
 
 
EQUA Co.,Ltd.
Yutaka Bldg. 5F, 8-10-6 Sagami-Ono, Minami-ku, Sagamihara, Kanagawa 252-0303, Japan

Tel: +81-42-745-2027
Fax: +81-42-745-2047

・Photomasks
・Precision Thin Film Products
・Optical Components
・Precision Metal Components

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