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Basic Specifications and Standards

Chrome Mask Sizes

The substrate size for photomasks is determined by the exposure machine and the exposure method. For small photomasks (7 x 7 inches or less) the sizes have been standardized, with 4-inch, 5-inch, 6-inch, and 7-inch sizes, and thicknesses of 1.5 mm, 2.3 mm, and 3.0 mm generally being used. Depending on the exposure equipment, masks with sizes and thicknesses larger than that are also quite numerous, and can be cut into specific sizes after imaging. The tables shown below are the general standards.

Chrome Mask Sizes and Thicknesses

Quartz Chrome Masks

Sizes
0.06 inches
0.09 inches
0.12 inches
-
0.25 inches
-
1.5 mm 2.3 mm 3.0 mm 5.0 mm 6.35 mm 8.0 mm
4 x 4 inches
- - -
-
5 x 5 inches
- - - -
6 x 6 inches -
-
-
7 x 7 inches -
-
- - -
9 x 9 inches
- -
-
-
350 x 350 mm
-
-
-
-
-
700 x 800 mm
-
-
-
-
We can also provide sizes larger than those shown above. Please contact us for details.

Soda-Lime Chrome Mask

Sizes 0.06 inches 0.09 inches 0.12 inches - 0.25 inches -
1.5 mm
2.3 mm 3.0 mm 4.8 mm 6.35 mm 7.8 mm
4 x 4 inches
-
- - -
5 x 5 inches
-
-
-
-
6 x 6 inches -
-
- - -
7 x 7 inches -
-
-
- -
9 x 9 inches - -
- - -
355.6 x 431.8 mm
- -
-
- -
430 x 430 mm
-
-
-
-
508 x 609.6 mm
- -
-
- -
700 x 800 mm
- - -
- -
We can also provide many sizes other than those shown above. Please contact us for details.

Film Mask Sizes

In accordance with the needs of the customer, film sizes are available up to a maximum size of about 2,400 x 1,600 mm, with a pattern area of about 2,300 x 1,500 mm.

Specification of Photomasks

A variety of photomask imaging equipment models are available, depending on precision, imaging range, and so on. Even for the same model, a number of imaging modes (resolutions) can be selected by changing the lens.
There are also different types of data used by the imaging device. At EQUA, by editing data from the original CAD data to data optimized for the imaging equipment, we provide photomasks with a minimum line width of 1 µm and a high precision of ±0.1 µm.
Chrome Masks
Small
Chome Masks
Large
Film Masks
Maximum Size
228.6 x 228.6 mm
711 X 813 mm
about 2400 x 1600 mm
Maximum Wiring Area
212.6 x 212.6 mm
681 X 783 mm
about 2300 x 1500 mm
Minimum Line Width 1 µm
5 µm
20 µm
Line Width Tolerance
±0.1, ±0.3, ±0.5,
±1.0 µm
±0.3, ±0.5, ±1.0,
±2.0 µm
±4.0 µm
EQUA Co.,Ltd.
Yutaka Bldg. 5F, 8-10-6 Sagami-Ono, Minami-ku, Sagamihara, Kanagawa 252-0303, Japan

Tel: +81-42-745-2027
Fax: +81-42-745-2047

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・Precision Thin Film Products
・Optical Components
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